Browsing by author "Gijbels, R."
Now showing items 1-6 of 6
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Depth profiling of ZrO2/SiO2/Si stacks - a TOF-SIMS and computer simulation study
Ignatova, V.A.; Conard, Thierry; Moller, W.; Vandervorst, Wilfried; Gijbels, R. (2004) -
Depth profiling of ZrO2/SiO2/Si stacks-a TOF-SIMS and computer simulation study
Ignatova, V.A.; Conard, Thierry; Möller, W.; Vandervorst, Wilfried; Gijbels, R. (2004-05) -
Depth profiling of ZrO2/SiO2/Si stacks-TOF-SIMS and computer simulation study
Ignatova, V.A.; Conard, Thierry; Moeller, W.; Vandervorst, Wilfried; Gijbels, R. (2003) -
Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation
Ignatova, V.A.; Möller, W.; Conard, Thierry; Vandervorst, Wilfried; Gijbels, R. (2005-02) -
Ion-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks
De Witte, Hilde; Conard, Thierry; Vandervorst, Wilfried; Gijbels, R. (2003) -
The dawn of surface analysis that stands by the side of users - Ultra-thin film analysis by rf-GDOES
Shimizu, K.; Habazaki, H.; Gijbels, R.; Bender, Hugo (2004)