Publication:
Depth profiling of ZrO2/SiO2/Si stacks - a TOF-SIMS and computer simulation study
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1787 since deposited on 2021-10-15
1last month
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Acq. date: 2026-08-10
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Statistics
Views
1787 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-08-10
Citations