Depth profiling of ZrO2/SiO2/Si stacks - a TOF-SIMS and computer simulation study

Publication:

2004

Journal article

Author(s)

Ignatova, V.A.

;

;

Moller, W.

;

;

Gijbels, R.

Applied Surface Science

1786 since deposited on 2021-10-15

Acq. date: 2026-04-25