Publication:
Depth profiling of ZrO2/SiO2/Si stacks - a TOF-SIMS and computer simulation study
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1786 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-15
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Metrics
Views
1786 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-15
Citations