Browsing by author "Tien, Ming-Chun"
Now showing items 1-2 of 2
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Critical pattern behavior at nanometer scale vicinity of black border
Kovalevich, Tatiana; Bekaert, Joost; Wiaux, Vincent; Liddle, Jack; Davydova, Natalia; Tien, Ming-Chun (2019) -
Stitching enablement for anamorphic imaging: a ~1μm exclusion band and its implications
Wiaux, Vincent; Bekaert, Joost; Kovalevich, Tatiana; Ryckaert, Julien; Hendrickx, Eric; Davydova, Natalia; Woltgens, Pieter; de Winter, Laurens; Maslow, Mark; Troost, Kars; Tien, Ming-Chun (2020)