Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Presentations
Critical pattern behavior at nanometer scale vicinity of black border
Publication:
Critical pattern behavior at nanometer scale vicinity of black border
Copy permalink
Date
2019
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kovalevich, Tatiana
;
Bekaert, Joost
;
Wiaux, Vincent
;
Liddle, Jack
;
Davydova, Natalia
;
Tien, Ming-Chun
Journal
Abstract
Description
Statistics
Views
2080
since deposited on 2021-10-27
5
last month
1
last week
Acq. date: 2026-02-25
Citations
Statistics
Views
2080
since deposited on 2021-10-27
5
last month
1
last week
Acq. date: 2026-02-25
Citations