Browsing by author "Szafranek, Bartholomaeus"

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    • EUV mask defect inspection for the 3nm technology node 

      Hermans, Yannick; Heil, Tilmann; Capelli, Renzo; Szafranek, Bartholomaeus; Rhinow, Daniel; Mette, Gerson; Salg, Patrick; Hermanns, Chistian Felix; Dey, Bappaditya; Halipre, Luc; Trivkovic, Darko; Rincon Delgadillo, Paulina; Marschner, Thomas; Halder, Sandip (2023)