Browsing by author "Olk, Christina"
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Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications
Swerts, Johan; Popovici, Mihaela Ioana; Kaczer, Ben; Aoulaiche, Marc; Redolfi, Augusto; Clima, Sergiu; Caillat, Cristian; Wang, W.C.; Afanasiev, Valeri; Jourdan, Nicolas; Hody, Hubert; Olk, Christina; Van Elshocht, Sven; Jurczak, Gosia (2014)