Publication:

Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications

Date

2014

Journal article

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Files

28879.pdf 1.37 MB

Author(s)

;

Popovici, Mihaela Ioana

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;

Aoulaiche, Marc

;

Redolfi, Augusto

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;

Caillat, Cristian

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;

Afanasiev, Valeri

;

Jourdan, Nicolas

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;

;

Van Elshocht, Sven

;

Journal

IEEE Electron Device Letters

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Acq. date: 2026-02-26