Publication:
Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications
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1917 since deposited on 2021-10-22
Acq. date: 2025-10-23
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1917 since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations