Publication:
Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications
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1922 since deposited on 2021-10-22
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Acq. date: 2025-12-10
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1922 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2025-12-10
Citations