Request a copy of the file
Enter the following information to request a copy for the following item: Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications
Requesting the following file: 28879.pdf
Enter the following information to request a copy for the following item: Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications
Requesting the following file: 28879.pdf