Publication:

Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications

Date

2014
Journal article
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dc.contributor.authorSwerts, Johan
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorKaczer, Ben
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorClima, Sergiu
dc.contributor.authorCaillat, Cristian
dc.contributor.authorWang, W.C.
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorHody, Hubert
dc.contributor.authorOlk, Christina
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorJurczak, Gosia
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorHody, Hubert
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-22T06:17:05Z
dc.date.available2021-10-22T06:17:05Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24580
dc.identifier.urlhttp://www.ieeeexplore.us/xpl/articleDetails.jsp?tp=&arnumber=6820790&queryText%3Dleakage+control+metal-insulator-metal+capacito
dc.source.beginpage753
dc.source.endpage755
dc.source.issue7
dc.source.journalIEEE Electron Device Letters
dc.source.volume37
dc.title

Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications

dc.typeJournal article
dspace.entity.typePublication
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