Browsing by author "Park, Tae Joo"

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Atomic layer deposition process of Hf-based high-k gate dielectric film on Si substrate

Park, Tae Joo; Cho, Moon Ju; Jung, Hyung-Suk; Hwang, cheol seong (2012-08)
Front end of the line process

Han, Jeong Hwan; Cho, Moon Ju; Delabie, Annelies; Park, Tae Joo; Hwang, cheol seong (2014)