Atomic layer deposition process of Hf-based high-k gate dielectric film on Si substrate

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Authors
Park, Tae Joo; Cho, Moon Ju; Jung, Hyung-Suk; Hwang, cheol seong
Book
High-k Gate Dielectrics for CMOS Technology
Title
Atomic layer deposition process of Hf-based high-k gate dielectric film on Si substrate
Publication type
Book chapter
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