Browsing by author "Ein-Eli, Yair"
Now showing items 1-2 of 2
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Potassium sorbate as an inhibitor in copper chemical mechanical planarization slurries. Part II: Effects of sorbate on chemical mechanical planarization performance
Nagar, Magi; Vaes, Jan; Ein-Eli, Yair (2010) -
Potassium sorbate as an inhibitor in copper chemical mechanical planarization. Part I. Elucidating slurry chemistry
Nagar, Magi; Starosvetsky, David; Vaes, Jan; Ein-Eli, Yair (2010)