Browsing by author "Nakatsuka, Osau"

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X-ray microdiffraction measurements to support epitaxial growth studies of strained Ge-cap / relaxed SiGe on STI nano-scale patterned Si wafers

Loo, Roger; Shimura, Yosuke; Sun, Jianwu; Ike, Shinichi; Inuzuka, Yuuki; Nakatsuka, Osau; Zaima, Shigeaki; Imai, Yasuhiko; Kimura, Shigeru (2015)