Browsing by author "Urbach, H. P."

Now showing items 1-2 of 2

Characterization of silicon oxynitride films by grazing-emission X-ray fluorescence spectrometry

Monaghan, M. L.; Nigam, Tanya; Houssa, Michel; De Gendt, Stefan; Urbach, H. P.; De Bokx, P. K. (2000)
Grazing-emission x-ray fluorescence spectrometry: a novel tool for surface contamination analysis and thin film metrology

De Bokx, P. K.; Kidd, S. J.; Wiener, G.; Urbach, H. P.; De Gendt, Stefan; Mertens, Paul; Heyns, Marc (1998)