Authors

De Bokx, P. K.; Kidd, S. J.; Wiener, G.; Urbach, H. P.; De Gendt, Stefan; Mertens, Paul; Heyns, Marc

Conference

Semiconductor Silicon 1998. Proceedings of the 8th International Symposium on Silicon Materials Science and Technology

Title

Grazing-emission x-ray fluorescence spectrometry: a novel tool for surface contamination analysis and thin film metrology

Publication type

Proceedings paper

Embargo date

9999-12-31