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Grazing-emission x-ray fluorescence spectrometry: a novel tool for surface contamination analysis and thin film metrology
Publication:
Grazing-emission x-ray fluorescence spectrometry: a novel tool for surface contamination analysis and thin film metrology
Date
1998
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Bokx, P. K.
;
Kidd, S. J.
;
Wiener, G.
;
Urbach, H. P.
;
De Gendt, Stefan
;
Mertens, Paul
;
Heyns, Marc
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1926
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations
Metrics
Views
1926
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations