Publication:

Grazing-emission x-ray fluorescence spectrometry: a novel tool for surface contamination analysis and thin film metrology

Date

1998
Proceedings Paper
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dc.contributor.authorDe Bokx, P. K.
dc.contributor.authorKidd, S. J.
dc.contributor.authorWiener, G.
dc.contributor.authorUrbach, H. P.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-09-30T11:40:14Z
dc.date.available2021-09-30T11:40:14Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2484
dc.source.beginpage1511
dc.source.conferenceSemiconductor Silicon 1998. Proceedings of the 8th International Symposium on Silicon Materials Science and Technology
dc.source.conferencedate4/05/1998
dc.source.conferencelocationSan Diego, CA USA
dc.source.endpage1523
dc.title

Grazing-emission x-ray fluorescence spectrometry: a novel tool for surface contamination analysis and thin film metrology

dc.typeProceedings paper
dspace.entity.typePublication
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