Browsing by author "Zhang, S. L."
Now showing items 1-5 of 5
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Electrical and mechanical characterization of chemical vapor deposition of tungsten on sputter-deposited TiN layers
Zhang, S. L.; Palmans, Roger; Petersson, C. S.; Maex, Karen (1995) -
Electroless deposition of Cu with solutions containing either Mg2+ or Pd2+ ions
Mouroux, Aliette; Zhang, S. L.; Palmans, Roger; Min, Woo Sig; Maex, Karen (1999) -
Impact of rapid thermal annealing of Ti/TiN bilayers on subsequent chemical vapor deposition of tungsten
Mouroux, Aliette; Palmans, Roger; Keinonen, J.; Zhang, S. L.; Maex, Karen; Petersson, S. (1996) -
Influence of hydrogen on chemical vapor deposition of tungsten on sputter-deposited TiN layers
Zhang, S. L.; Palmans, Roger; Keinonen, J.; Petersson, C. S.; Maex, Karen (1995) -
Stress Reduction in Tungsten CVD Films by RTA Post-Treatment of Ti/TiN Bilayers in Ammonia
Palmans, Roger; Mouroux, Aliette; Zhang, S. L.; Petersson, S.; Maex, Karen (1995)