Publication:
Electrical and mechanical characterization of chemical vapor deposition of tungsten on sputter-deposited TiN layers
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1953 since deposited on 2021-09-29
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Acq. date: 2025-10-25
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Metrics
Views
1953 since deposited on 2021-09-29
415item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations