Publication:
Electrical and mechanical characterization of chemical vapor deposition of tungsten on sputter-deposited TiN layers
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1957 since deposited on 2021-09-29
1last month
Acq. date: 2026-01-25
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Statistics
Views
1957 since deposited on 2021-09-29
1last month
Acq. date: 2026-01-25
Citations