Publication:
Electrical and mechanical characterization of chemical vapor deposition of tungsten on sputter-deposited TiN layers
Date
| dc.contributor.author | Zhang, S. L. | |
| dc.contributor.author | Palmans, Roger | |
| dc.contributor.author | Petersson, C. S. | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-09-29T13:28:07Z | |
| dc.date.available | 2021-09-29T13:28:07Z | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1043 | |
| dc.source.beginpage | 7313 | |
| dc.source.endpage | 22 | |
| dc.source.issue | 12 | |
| dc.source.journal | J. Appl. Phys. | |
| dc.source.volume | 78 | |
| dc.title | Electrical and mechanical characterization of chemical vapor deposition of tungsten on sputter-deposited TiN layers | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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