Browsing by author "Richardson, Paul"
Now showing items 1-3 of 3
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Bottom-ARC optimization methodology for 0.25μm lithography and beyond
Op de Beeck, Maaike; Vandenberghe, Geert; Jaenen, Patrick; Feng, Hong Zhang; Delvaux, Christie; Richardson, Paul; Van Puyenbroeck, Ilse; Ronse, Kurt; Lamb, J. E.; van der Hilst, J. B. C.; van Wingerden, Johannes (1998) -
In situ gas analysis on an RTP tool with APIMS
Vereecke, Guy; Kondoh, Eiichi; Richardson, Paul; Maex, Karen; Heyns, Marc; Nényei, Z. (1998) -
Wafer thermal desorption spectrometry in a rapid thermal processor using atmospheric pressure ionization mass spectrometry
Vereecke, Guy; Kondoh, Eiichi; Richardson, Paul; Maex, Karen; Heyns, Marc (2000)