Browsing by author "Barla, K."
Now showing items 1-2 of 2
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Micro-Raman spectroscopy evaluation of the local mechanical stress in shallow trench isolation CMOS structures: correlation with defect generation and diode leakage
De Wolf, Ingrid; Groeseneken, Guido; Maes, Herman; Bolt, M.; Barla, K.; Reader, A.; McNally, P. J. (1998) -
Simulation of mechanical stresses during shallow trench isolation process
Poncet, A.; Bolt, M.; Barla, K.; De Wolf, Ingrid (1998)