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Micro-Raman spectroscopy evaluation of the local mechanical stress in shallow trench isolation CMOS structures: correlation with defect generation and diode leakage
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1841 since deposited on 2021-09-30
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Acq. date: 2026-01-10
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1841 since deposited on 2021-09-30
1last month
1last week
Acq. date: 2026-01-10
Citations