Authors

De Wolf, Ingrid; Groeseneken, Guido; Maes, Herman; Bolt, M.; Barla, K.; Reader, A.; McNally, P. J.

Conference

Proceedings of the International Symposium on Testing and Failure Analysis- ISTFA

Title

Micro-Raman spectroscopy evaluation of the local mechanical stress in shallow trench isolation CMOS structures: correlation with defect generation and diode leakage

Publication type

Proceedings paper

Embargo date

9999-12-31