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Micro-Raman spectroscopy evaluation of the local mechanical stress in shallow trench isolation CMOS structures: correlation with defect generation and diode leakage
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1840 since deposited on 2021-09-30
3last month
Acq. date: 2025-12-10
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Views
1840 since deposited on 2021-09-30
3last month
Acq. date: 2025-12-10
Citations