Browsing by author "Frank, M.M."

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Gate oxide atomic layer deposition studied by in situ infrared spectroscopy

Frank, M.M.; Dörmann, S.; Chabal, Y.J.; Sayan, S.; Garfunkel, E.; Wilk, G.D.; Green, M.L.; Delabie, Annelies; Brijs, Bert (2003)