Gate oxide atomic layer deposition studied by in situ infrared spectroscopy

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Authors
Frank, M.M.; Dörmann, S.; Chabal, Y.J.; Sayan, S.; Garfunkel, E.; Wilk, G.D.; Green, M.L.; Delabie, Annelies; Brijs, Bert
Conference
E-MRS Spring Meeting Symposium I Functional Metal Oxides - Semiconductor Structures
Title
Gate oxide atomic layer deposition studied by in situ infrared spectroscopy
Publication type
Oral presentation
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