Browsing by author "Capelli, Renzo"
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EUV mask defect inspection for the 3nm technology node
Hermans, Yannick; Heil, Tilmann; Capelli, Renzo; Szafranek, Bartholomaeus; Rhinow, Daniel; Mette, Gerson; Salg, Patrick; Hermanns, Chistian Felix; Dey, Bappaditya; Halipre, Luc; Trivkovic, Darko; Rincon Delgadillo, Paulina; Marschner, Thomas; Halder, Sandip (2023) -
Fundamental understanding and experimental verification of bright versus dark field imaging
Davydova, Natalia; Finders, Jo; van Lare, Claire; McNamara, John; Van Setten, Eelco; Zekry, Joseph; Fliervoet, Timon; Carpaij, Rene; Franke, Joern-Holger; Frommhold, Andreas; Verch, Andreas; Kersteen, Grizelda; Capelli, Renzo (2020) -
Stochastic printing behavior of ML-defects on EUV mask
Jonckheere, Rik; Melvin, Lawrence; Capelli, Renzo (2019-09)