Browsing by author "Estroff, Andrew"
Now showing items 1-3 of 3
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Mask-induced polarization effects at high NA
Estroff, Andrew; Fan, Yongfa; Bourov, Anatoly; Smith, Bruce; Foubert, Philippe; Leunissen, Peter; Philipsen, Vicky; Aksenov, Yuri (2005-03) -
Source polarization and OPC effects on illumination optimization
Brist, Travis; Bailey, George E.; Drozdov, Alexander; Torres, Andres; Estroff, Andrew; Hendrickx, Eric (2005) -
Validation of immersion lithography OPC model accuracy
Estroff, Andrew; Bailey, George; Kostas, Adam; Vandenberghe, Geert; Hendrickx, Eric (2005)