Browsing by author "Suri, Mayur"
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Defect source analysis of directed self-assembly process
Rincon Delgadillo, Paulina; Suri, Mayur; Durant, Stephane; Cross, Andrew; Nagaswami, Venkat; Van Den Heuvel, Dieter; Gronheid, Roel; Nealey, Paul (2013) -
Defect source analysis of directed self-assembly process (DSA of DSA)
Rincon Delgadillo, Paulina; Harukawa, Ryota; Suri, Mayur; Durant, Stephane; Cross, Andrew; Nagaswami, Venkat; Van Den Heuvel, Dieter; Gronheid, Roel; Nealey, Paul (2013)