Defect source analysis of directed self-assembly process

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Authors

Rincon Delgadillo, Paulina; Suri, Mayur; Durant, Stephane; Cross, Andrew; Nagaswami, Venkat; Van Den Heuvel, Dieter; Gronheid, Roel; Nealey, Paul

ISSN

1537-1646

Issue

3

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

12

Title

Defect source analysis of directed self-assembly process

Publication type

Journal article

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