Publication:

Defect source analysis of directed self-assembly process

Date

2013
Journal article
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dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorSuri, Mayur
dc.contributor.authorDurant, Stephane
dc.contributor.authorCross, Andrew
dc.contributor.authorNagaswami, Venkat
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorCross, Andrew
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorGronheid, Roel
dc.date.accessioned2021-10-21T11:25:28Z
dc.date.available2021-10-21T11:25:28Z
dc.date.issued2013
dc.identifier.issn1537-1646
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22999
dc.source.beginpage31112
dc.source.issue3
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.volume12
dc.title

Defect source analysis of directed self-assembly process

dc.typeJournal article
dspace.entity.typePublication
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