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Defect source analysis of directed self-assembly process
Publication:
Defect source analysis of directed self-assembly process
Date
2013
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rincon Delgadillo, Paulina
;
Suri, Mayur
;
Durant, Stephane
;
Cross, Andrew
;
Nagaswami, Venkat
;
Van Den Heuvel, Dieter
;
Gronheid, Roel
;
Nealey, Paul
Journal
Journal of Micro/Nanolithography MEMS and MOEMS
Abstract
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1971
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations
Metrics
Views
1971
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations