Browsing by author "Pei-Yang, Yan"
Now showing items 1-3 of 3
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Evidence of speckle in extreme-UV lithography
Vaglio Pret, Alessandro; Gronheid, Roel; Engelen, Jan; Pei-Yang, Yan; Leeson, Michael; Younkin, Todd (2012-10) -
Impact of extreme UV mask flatness on resist roughness
Vaglio Pret, Alessandro; Gronheid, Roel; Younkin, Todd; Leeson, Michael; Pei-Yang, Yan (2012) -
Mask roughness effects on pattern variability
Vaglio Pret, Alessandro; Gronheid, Roel; Lorusso, Gian; Younkin, Todd; Pei-Yang, Yan; Leeson, Michael (2012)