Evidence of speckle in extreme-UV lithography

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Authors

Vaglio Pret, Alessandro; Gronheid, Roel; Engelen, Jan; Pei-Yang, Yan; Leeson, Michael; Younkin, Todd

ISSN

1094-4087

Issue

23

Journal

Optics Express

Volume

20

Title

Evidence of speckle in extreme-UV lithography

Publication type

Journal article

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