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Evidence of speckle in extreme-UV lithography
Publication:
Evidence of speckle in extreme-UV lithography
Date
2012-10
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vaglio Pret, Alessandro
;
Gronheid, Roel
;
Engelen, Jan
;
Pei-Yang, Yan
;
Leeson, Michael
;
Younkin, Todd
Journal
Optics Express
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1943
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1943
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations