Browsing by author "Guerrero, Douglas"
Now showing items 1-4 of 4
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Evaluation of integration schemes for contact-hole grapho-epitaxy DSA: a study of substrate and template affinity control
Romo Negreira, Ainhoa; Younkin, Todd; Gronheid, Roel; Demuynck, Steven; Vandenbroeck, Nadia; Seo, Takehito; Guerrero, Douglas; Parnell, Doni; Muramatsu, Makoto; Shinichiro, Kawakami; Takashi, Yamauchi; Nafus, Kathleen; Somervell, Mark (2014) -
Improving EUV underlayer coating defectivity using point-of-use filtration
Wu, Aiwen; Bayana, Hareen; Foubert, Philippe; Chacko, Andrea; Guerrero, Douglas (2020) -
Outgassing studies on EUV underlayers containing PAGs
Guerrero, Douglas; Ouattara, Tantiboro; Pollentier, Ivan; Lokasani, Ragava (2011) -
Underlayer optimization method for EUV lithography
Vanelderen, Pieter; Vandenbroeck, Nadia; Liang, Y.C.; Van Driessche, Veerle; Guerrero, Douglas; Chacko, A.; De Simone, Danilo; Vandenberghe, Geert (2020)