Browsing by author "Hiraga, Keizo"
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Impact of fin shape variability on device performance towards 10nm node
Tomida, Kazuyuki; Hiraga, Keizo; Dehan, Morin; Hellings, Geert; Jang, Doyoung; Miyaguchi, Kenichi; Chiarella, Thomas; Kim, Min-Soo; Mocuta, Anda; Horiguchi, Naoto; Mercha, Abdelkarim; Verkest, Diederik; Thean, Aaron (2015)