Impact of fin shape variability on device performance towards 10nm node

Thumbnail
Metadata
Show full item record
Authors
Tomida, Kazuyuki; Hiraga, Keizo; Dehan, Morin; Hellings, Geert; Jang, Doyoung; Miyaguchi, Kenichi; Chiarella, Thomas; Kim, Min-Soo; Mocuta, Anda; Horiguchi, Naoto; Mercha, Abdelkarim; Verkest, Diederik; Thean, Aaron
Conference
International Conference on IC Design & Technology - ICICDT
Title
Impact of fin shape variability on device performance towards 10nm node
Publication type
Proceedings paper
Collections