Publication:

Impact of fin shape variability on device performance towards 10nm node

Date

2015

Proceedings Paper

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Author(s)

Tomida, Kazuyuki

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;

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Hellings, Geert

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;

Miyaguchi, Kenichi

;

Chiarella, Thomas

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;

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Horiguchi, Naoto

;

Mercha, Abdelkarim

;

Verkest, Diederik

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Statistics

1884 since deposited on 2021-10-22

Acq. date: 2026-02-26