Browsing by author "Iacob, Erica"

Now showing items 1-1 of 1

TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

Barozzi, Mario; Iacob, Erica; van den Berg, Jaap A.; Reading, Michael A.; Adelmann, Christoph; Popovici, Mihaela Ioana; Tielens, Hilde; Bersani, Massimo (2013)