Browsing by author "Reading, M. A."

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High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.; Reading, M. A.; Parisini, A.; Kolbe, M.; Beckhoff, B.; Ladas, S.; Fried, M.; Petrik, P.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009)
High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers

Reading, M. A.; van den Berg, J. A.; Zalm, P. C.; Armour, D. G.; Bailey, P.; Noakes, T. C. Q.; Parisini, A.; Conard, Thierry; De Gendt, Stefan (2010)