Browsing by author "Shimokawa, Tsutomu"
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Double patterning process with resist freezing technique
Hoshiko, Kenji; Shioya, Takeo; Fujiwara, Koichi; Yamaguchi, Yoshikazu; Shimokawa, Tsutomu; Maenhoudt, Mireille; Miller, Andy; Vangoidsenhoven, Diziana (2008)