Publication:

Double patterning process with resist freezing technique

Date

2008

Proceedings Paper

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Files

16971.pdf 2.96 MB

Author(s)

;

;

Fujiwara, Koichi

;

Yamaguchi, Yoshikazu

;

Shimokawa, Tsutomu

;

Maenhoudt, Mireille

;

;

Vangoidsenhoven, Diziana

Metrics

1933 since deposited on 2021-10-17

Acq. date: 2025-12-10