Browsing by author "Yamauchi, Takashi"

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Novel technologies in coater/developer to enhance the CD stability and to improve the defectivity toward N7 and smaller nodes

Kamei, Yuya; Sano, Yohei; Yamauchi, Takashi; Kawakami, Shinichiro; Tadokoro, Masahide; Enomoto, Masashi; Muramatsu, Makoto; Nafus, Kathleen; Sonoda, Akihiro; Demand, Marc; Foubert, Philippe (2019)