Browsing by author "Holland, K."

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A static model for scratches generated during aluminum chemical-mechanical polishing process: orbital technology

Zhong, L.; Yang, Jiping; Holland, K.; Grillaert, Joost; Devriendt, Katia; Heylen, Nancy; Meuris, Marc (1999)
Characterization of slurry system and suppression of oxide erosion in aluminun CMP (chemical-mechanical planarization)

Zhong, L.; Yang, G.; Holland, K.; Grillaert, Joost; Devriendt, Katia; Heylen, Nancy; Meuris, Marc (2000)