Authors

Zhong, L.; Yang, Jiping; Holland, K.; Grillaert, Joost; Devriendt, Katia; Heylen, Nancy; Meuris, Marc

Issue

4A

Journal

Japanese Journal of Applied Physics. Part 1: Regular Papers

Volume

38

Title

A static model for scratches generated during aluminum chemical-mechanical polishing process: orbital technology

Publication type

Journal article