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A static model for scratches generated during aluminum chemical-mechanical polishing process: orbital technology
Publication:
A static model for scratches generated during aluminum chemical-mechanical polishing process: orbital technology
Date
1999
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhong, L.
;
Yang, Jiping
;
Holland, K.
;
Grillaert, Joost
;
Devriendt, Katia
;
Heylen, Nancy
;
Meuris, Marc
Journal
Japanese Journal of Applied Physics. Part 1: Regular Papers
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1964
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1964
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations