A static model for scratches generated during aluminum chemical-mechanical polishing process: orbital technology

dc.contributor.author	Zhong, L.
dc.contributor.author	Yang, Jiping
dc.contributor.author	Holland, K.
dc.contributor.author	Grillaert, Joost
dc.contributor.author	Devriendt, Katia
dc.contributor.author	Heylen, Nancy
dc.contributor.author	Meuris, Marc
dc.contributor.imecauthor	Devriendt, Katia
dc.contributor.imecauthor	Heylen, Nancy
dc.contributor.imecauthor	Meuris, Marc
dc.contributor.orcidimec	Devriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimec	Meuris, Marc::0000-0002-9580-6810
dc.date.accessioned	2021-10-14T12:00:46Z
dc.date.available	2021-10-14T12:00:46Z
dc.date.issued	1999
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/4054
dc.source.beginpage	1932
dc.source.endpage	1938
dc.source.issue	4A
dc.source.journal	Japanese Journal of Applied Physics. Part 1: Regular Papers
dc.source.volume	38
dc.title	A static model for scratches generated during aluminum chemical-mechanical polishing process: orbital technology
dc.type	Journal article
dspace.entity.type	Publication
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